Equipment Sharing Center at the V. Lashkaryov Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine "Diagnostics of Semiconductor Materials, Structures and Devices".

Center for collective use of scientific equipment

Semilab SE-2000 Spectroscopic Ellipsometer

eqp.c9ftp4

Published

Jan. 1, 2016

Jan. 26, 2017

Угорщина

is used as intended (working), there are specialists who ensure the operation and servicing of the device

Determination of optical constants (refractive index, absorption coefficient) and film thickness in multilayer systems and bulk materials.<br /> Typical objects of study: thin metallic, dielectric, and semiconductor films (ranging from microns to nanometers);<br /> organic layers and polymers; R&D materials, 2D and 3D nanostructures;<br /> comprehensive layer-by-layer characterization and modeling of the optical properties of components for multilayer structures (for each layer separately) using appropriate dispersion relations;<br /> mathematical modeling of optical constants as a function of wavelength or photon energy within the frameworks of Cauchy, Sellmeier models, etc. (transparent region), Lorentz, Gaussian, Tauc-Lorentz, etc. (absorption region);<br /> transmission spectroscopy of films on glass substrates.<br /> Lambda = 245-2150 nm, incidence angle range 15°-90°, beam size 470 µm x 0.365 µm.

INSTYTUT FIZYKY NAPIVPROVIDNYKIV IMENI V.IE.LASHKAROVA NATSIONALNOYI AKADEMIYI NAUK UKRAYINY