Equipment Sharing Center at the V. Lashkaryov Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine "Diagnostics of Semiconductor Materials, Structures and Devices".
Center for collective use of scientific equipment
Equipment information
The name of the equipment
High-resolution X-ray diffractometer X'Pert PRO MRD
Identifier
eqp.xh21pz
Status
Published
Date of manufacture
Jan. 1, 2005
Purchase date
Feb. 28, 2006
Country of manufacture
Netherlands
Condition of scientific equipment/equipment
is used as intended (working), there are specialists who ensure the operation and servicing of the device
Functional purpose of the equipment
- Phase analysis of samples of various shapes and sizes;<br />
- Structural and phase analysis of thin films in grazing incidence geometry;<br />
- X-ray reflectometry;<br />
- Determination of residual stresses in both Psi and Omega scanning modes;<br />
- Diagnosis of structural quality using high-resolution scattering maps around reciprocal lattice points;<br />
- Determination of parameters of multilayer epitaxial structures (layer thickness, composition, repetition period)"
Owner institution
INSTYTUT FIZYKY NAPIVPROVIDNYKIV IMENI V.IE.LASHKAROVA NATSIONALNOYI AKADEMIYI NAUK UKRAYINY