Equipment Sharing Center at the V. Lashkaryov Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine "Diagnostics of Semiconductor Materials, Structures and Devices".
Center for collective use of scientific equipment

Equipment information

The name of the equipment

Secondary Ion Mass Spectrometer Atomika 4000 SIMS

Identifier

eqp.zg5vbf

Status

Published

Date of manufacture

Jan. 1, 1999

Purchase date

May 10, 2017

Country of manufacture

Germany

Condition of scientific equipment/equipment

is used as intended (working), there are specialists who ensure the operation and servicing of the device

Functional purpose of the equipment

Analysis of the elemental composition on the surface of samples, ranging from hydrogen to uranium, with concentration levels from ppm to ppb. Depth profiling of impurities and surface distribution of impurities in samples, with a resolution of at least 3 nm and 0.5 µm, respectively.

Owner institution

INSTYTUT FIZYKY NAPIVPROVIDNYKIV IMENI V.IE.LASHKAROVA NATSIONALNOYI AKADEMIYI NAUK UKRAYINY

Equipment Sharing Center at the V. Lashkaryov Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine "Diagnostics of Semiconductor Materials, Structures and Devices". Center for collective use of scientific equipment

Equipment information

Equipment Sharing Center at the V. Lashkaryov Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine "Diagnostics of Semiconductor Materials, Structures and Devices".
Center for collective use of scientific equipment